Patent Assignment
Reel/Frame 030280/0781
Assignment of Assignor's Interest
Recorded: 2013-04-24
Pages: 3
Assignors
WANG, WEN-YUN
Executed: 2013-03-20
WU, CHENG-HAN
Executed: 2013-03-21
SU, YU-CHUNG
Executed: 2013-03-21
CHANG, CHING-YU
Executed: 2013-03-20
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Method and Apparatus for Planarization of Substrate Coatings