Patent Assignment
Reel/Frame 030287/0585
Assignment of Assignor's Interest
Recorded: 2013-04-25
Pages: 3
Assignor
TANAKA, TETSUHIRO
Executed: 2013-04-22
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device