Patent Assignment
Reel/Frame 030294/0508
Assignment of Assignor's Interest
Recorded: 2013-04-26
Pages: 4
Assignors
IWATA, MANABU
Executed: 2013-04-05
UMEHARA, NAOYUKI
Executed: 2013-04-05
ENDO, HIROKI
Executed: 2013-04-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus