Patent Assignment
Reel/Frame 030301/0044
Assignment of Assignor's Interest
Recorded: 2013-04-26
Pages: 3
Assignors
SMILDE, HENDRIK JAN HIDDE
Executed: 2013-03-14
ADAM, OMER ABUBAKER OMER
Executed: 2013-03-19
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method