Patent Assignment
Reel/Frame 030301/0538
Assignment of Assignor's Interest
Recorded: 2013-04-27
Pages: 3
Assignor
PNINI-MITTLER, BOAZ
Executed: 2013-04-22
Assignee
CARL ZEISS SMT GMBH
.RUDOLF-EBER-STRASSE 2, ., OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Systems for Aligning an Optical Element and Method for Same