Patent Assignment
Reel/Frame 030313/0007
Assignment of Assignor's Interest
Recorded: 2013-04-30
Pages: 5
Assignors
PFORR, RAINER
Executed: 2013-04-29
BEN-ZVI, GUY
Executed: 2013-04-28
DMITRIEV, VLADIMIR
Executed: 2013-04-28
GRAITZER, EREZ
Executed: 2013-04-28
Assignee
CARL ZEISS SMS LTD.
44 MAALE CAMON, KARMIEL, 21613, ISRAEL
Covered Property
(1)
Lithographic Targets for Uniformity Control