Patent Assignment
Reel/Frame 030314/0062
Assignment of Assignor's Interest
Recorded: 2013-04-30
Pages: 9
Assignors
TSAI, CHUN HSIUNG
Executed: 2013-04-26
PAI, YI-FANG
Executed: 2013-04-26
SU, CHIEN-CHANG
Executed: 2013-04-26
TSENG, TZU-CHUN
Executed: 2013-04-26
LIU, MENG-YUEH
Executed: 2013-04-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Asymmetric Cyclic Desposition Etch Epitaxy