Patent Assignment
Reel/Frame 030333/0819
Assignment of Assignor's Interest
Recorded: 2013-05-02
Pages: 6
Assignors
CUVALCI, OLKAN
Executed: 2013-03-28
TZU, GWO-CHUAN
Executed: 2013-03-27
YUAN, XIAOXIONG
Executed: 2013-03-28
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Substrate Support Plate with Improved Lift Pin Sealing