Patent Assignment
Reel/Frame 030341/0539
Assignment of Assignor's Interest
Recorded: 2013-05-03
Pages: 2
Assignors
KUSUMOTO, HIRONORI
Executed: 2013-03-06
OHMOTO, YUTAKA
Executed: 2013-03-06
NAKAMOTO, KAZUNORI
Executed: 2013-03-06
NAGAI, KOJI
Executed: 2013-03-06
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Sample Stage Thereof
Application:
13/798,270 →
Publication:
US 2014/0216657
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.