Patent Assignment
Reel/Frame 030346/0403
Assignment of Assignor's Interest
Recorded: 2013-05-03
Pages: 6
Assignors
RADOVANOV, SVETLANA
Executed: 2013-04-05
GODET, LUDOVIC
Executed: 2013-04-01
ROCKWELL, TYLER
Executed: 2013-04-30
CAMPBELL, CHRIS
Executed: 2013-04-30
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
System and Method for Plasma Control Using Boundary Electrode