Patent Assignment
Reel/Frame 030347/0506
Assignment of Assignor's Interest
Recorded: 2013-05-03
Pages: 6
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Novel Patterning Approach for Improved Via Landing Profile