Patent Assignment
Reel/Frame 030351/0112
Assignment of Assignor's Interest
Recorded: 2013-05-05
Pages: 4
Assignors
OKAZAKI, KENICHI
Executed: 2013-04-22
SASAKI, TOSHINARI
Executed: 2013-03-26
YOKOYAMA, SHUHEI
Executed: 2013-03-20
HAMOCHI, TAKASHI
Executed: 2013-04-22
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Insulating Film, Method for Manufacturing Semiconductor Device, and Semiconductor Device