Assignment of Assignor's Interest

Recorded: 2013-05-06 Pages: 5

Assignors

OLSEN, CHRISTOPHER K.

Executed: 2013-03-15

FERNANDEZ, LUIS

Executed: 2013-03-17

Assignee

TEL EPION INC.

37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821

Covered Property (1)

Gas Cluster Ion Beam Process for Opening Conformal Layer in a High Aspect Ratio Contact Via

Patent: 8,722,542 →

Application: 13/841,388 →

Publication: US 2013/0330845

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.