Patent Assignment
Reel/Frame 030358/0675
Assignment of Assignor's Interest
Recorded: 2013-05-06
Pages: 2
Assignors
LI, YOUSEN
Executed: 2013-05-03
LEE, STEVEN
Executed: 2013-05-06
CHEN, DAVID ZHEHAO
Executed: 2013-05-02
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Method and Device for Measuring Temperature of Substrate in Vacuum Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.