Patent Assignment
Reel/Frame 049352/0507
Change of Name
Recorded: 2019-06-03
Pages: 6
Assignor
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Executed: 2018-12-21
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
188 TAIHUA ROAD JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), SHANGHAI, 201201 PUDONG, CHINA
Covered Properties
(25)
Multi-Station Decoupled Reactive Ion Etch Chamber
High Frequency Power Supply Device and High Frequency Power Supplying Method
Capacitive-Coupled Plasma Processing Apparatus and Method for Processing Substrate
Cleaning Apparatus and Method, and Film Growth Reaction Apparatus and Method
Performance Enhancement of Coating Packaged Esc for Semiconductor Apparatus
Chemical Vapor Deposition or Epitaxial-Layer Growth Reactor and Supporter Thereof
Application:
13/681,768 →
Publication:
US 2013/0125820
Coating for Performance Enhancement of Semiconductor Apparatus
Application:
14/065,323 →
Publication:
US 2014/0116338
Coating Packaged Chamber Parts for Semiconductor Plasma Apparatus
Coating Packaged Chamber Parts for Semiconductor Plasma Apparatus
Gas Showerhead, Method for Making the Same and Thin Film Growth Reactor
Method and Device for Measuring Temperature of Substrate in Vacuum Processing Apparatus
Plasma Processing Method and Plasma Processing Device
Icp Source Design for Plasma Uniformity and Efficiency Enhancement
Icp Source Design for Plasma Uniformity and Efficiency Enhancement
Application:
15/207,495 →
Publication:
US 2016/0322205
Method for Measuring Temperature of Film in Reaction Chamber
Device of Changing Gas Flow Pattern and a Wafer Processing Method and Apparatus
Method to Improve Mocvd Reaction Process by Forming Protective Film
Processing Chamber, Combination of Processing Chamber and Loadlock, and System for Processing Substrates
Chemical Vapor Deposition Apparatus and Its Cleaning Method
Electrode Structure for Icp Etcher
Application:
15/387,644 →
Publication:
US 2017/0186585
Temperature Adjusting Apparatus and Method for a Focus Ring
Multi-Zone Active-Matrix Temperature Control System and Temperature Control Method, and Electrostatic Chuck and Plasma Processing Apparatus Apply Thereof
Application:
15/380,979 →
Publication:
US 2017/0186592
Plasma Reactor Having a Variable Coupling of Low Frequency Rf Power to an Annular Electrode
Apparatus and Method for Controlling Heating of Base Within Chemical Vapour Deposition Chamber
Apparatus and Method for Controlling Heating of Base Within Chemical Vapour Deposition Chamber
Related Assignments
(22)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 6, 2012
From: JIANG, YINXIN; SUN, YIJUN; DU, ZHIYOU
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC.
Reel/Frame 028002/0154 →
Corrective Assignment to Correct the Name of the Assignee to Advanced Micro-Fabrication Equipment Inc., Shanghai Previously Recorded on Reel 028002 Frame 0154. Assignor(S) Hereby Confirms the Name of the Assignee Is Advanced Micro-Fabrication Equipment Inc., Shanghai.
Apr 13, 2012
From: JIANG, YINXIN; SUN, YIJUN; DU, ZHIYOU
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC., SHANGHAI
Reel/Frame 028040/0148 →
Assignment of Assignor's Interest
Aug 1, 2012
From: LIU, ZHONGDU; YIN, GERALD ZHEYAO
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC
Reel/Frame 028701/0685 →
Assignment of Assignor's Interest
Nov 20, 2012
From: YIN, GERALD ZHEYAO; JIANG, YONG
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 029328/0387 →
Assignment of Assignor's Interest
May 6, 2013
From: LI, YOUSEN; LEE, STEVEN; CHEN, DAVID ZHEHAO
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 030358/0675 →
Assignment of Assignor's Interest
May 9, 2013
From: JIANG, YONG; ZHOU, NING; HO, HENRY; DU, ZHIYOU
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGAI
Reel/Frame 030388/0988 →
Assignment of Assignor's Interest
Oct 11, 2013
From: XU, LEI; NI, TUQIANG; XI, ZHAOHUI
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 031406/0806 →
Record to Correct the First Assignor's Execution Date Previously Recorded at Reel 031406, Frame 0806.
Oct 18, 2013
From: XU, LEI; NI, TUQIANG; XI, ZHAOHUI
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 031505/0591 →
Assignment of Assignor's Interest
Oct 28, 2013
From: HE, XIAOMING; ZHANG, LI; CHEN, XINGJIAN; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 031493/0786 →
Assignment of Assignor's Interest
Oct 28, 2013
From: HE, XIAOMING; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 031493/0525 →
Assignment of Assignor's Interest
Oct 29, 2013
From: HE, XIAOMING; WAN, LEI; XU, ZHAOYANG; YANG, PING
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 031504/0664 →
Assignment of Assignor's Interest
Oct 29, 2013
From: XU, SONGLIN; SHI, GANG; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 031504/0864 →
Assignment of Assignor's Interest
Aug 7, 2014
From: CHEN, LU; ZHANG, CHAOQIAN; MA, YANZHONG; LI, YOUSEN
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 033500/0429 →
Assignment of Assignor's Interest
Sep 2, 2015
From: HAYANO, EIICH; NAKAMURA, TAKESHI; MAEKAWA, YASUNORI; IIZUKA, HIROSHI
To: PEARL KOGYO CO., LTD.; ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 036482/0019 →
Assignment of Assignor's Interest
Nov 9, 2015
From: YIN, GERALD; NI, TUQIANG; CHEN, JINYUAN; QIAN, XUEYU
To: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
Reel/Frame 036996/0757 →
Assignment of Assignor's Interest
Nov 11, 2015
From: ADVANCED MICRO-FABRICATION EQUIPMENT, INC. ASIA
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 037017/0885 →
Corrective Assignment to Correct the Assignee Name Previously Recorded at Reel: 028701 Frame: 0685. Assignor(S) Hereby Confirms the Assignment.
Nov 12, 2015
From: LIU, ZHONGDU; YIN, GERALD ZHEYAO
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 037108/0332 →
Assignment of Assignor's Interest
Nov 19, 2015
From: NI, TUQIANG; HUANG, ZHILIN
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 037091/0645 →
Assignment of Assignor's Interest
Dec 2, 2015
From: TAO, HENG; NI, TUQIANG; WANG, QIAN
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 037197/0183 →
Assignment of Assignor's Interest
Jul 11, 2016
From: XU, SONGLIN; SHI, GANG; NI, TUQIANG
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 039127/0326 →
Assignment of Assignor's Interest
Apr 7, 2017
From: HE, XIAOMING; WAN, LEI; XU, ZHAOYANG; YANG, PING
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 041933/0752 →
Assignment of Assignor's Interest
Sep 18, 2018
From: HE, XIAOMING; GUO, SHIPING
To: ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Reel/Frame 046904/0310 →