Patent Assignment
Reel/Frame 031504/0864
Assignment of Assignor's Interest
Recorded: 2013-10-29
Pages: 4
Assignors
XU, SONGLIN
Executed: 2013-10-21
SHI, GANG
Executed: 2013-10-21
NI, TUQIANG
Executed: 2013-10-17
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Icp Source Design for Plasma Uniformity and Efficiency Enhancement
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.