Patent Assignment
Reel/Frame 039127/0326
Assignment of Assignor's Interest
Recorded: 2016-07-11
Pages: 3
Assignors
XU, SONGLIN
Executed: 2013-10-21
SHI, GANG
Executed: 2013-10-21
NI, TUQIANG
Executed: 2013-10-17
Assignee
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
188 TAIHUA ROAD, JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG, SHANGHAI, 201201, CHINA
Covered Property
(1)
Icp Source Design for Plasma Uniformity and Efficiency Enhancement
Application:
15/207,495 →
Publication:
US 2016/0322205
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.