Patent Assignment
Reel/Frame 030364/0740
Assignment of Assignor's Interest
Recorded: 2013-05-07
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Component of a Plasma Processing Apparatus Having a Protective in Situ Formed Layer on a Plasma Exposed Surface