Patent Assignment
Reel/Frame 030378/0398
Assignment of Assignor's Interest
Recorded: 2013-05-08
Pages: 3
Assignor
SHIMAZU, AKIRA
Executed: 2013-01-10
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Charged Particle Beam Lens and Charged Particle Beam Exposure Apparatus