Patent Assignment
Reel/Frame 030386/0445
Assignment of Assignor's Interest
Recorded: 2013-05-09
Pages: 4
Assignee
SHINKO ELECTRIC INDUSTRIES CO., LTD.
80, OSHIMADA-MACHI, NAGANO-SHI,, NAGANO, 381-2287, JAPAN
Covered Property
(1)
Electrostatic Chuck and Method for Manufacturing the Electrostatic Chuck