Patent Assignment
Reel/Frame 030405/0630
Assignment of Assignor's Interest
Recorded: 2013-05-13
Pages: 4
Assignors
DAVID, JEFFREY DRUE
Executed: 2009-09-21
BENVEGNU, DOMINIC J.
Executed: 2009-09-21
LEE, HARRY Q.
Executed: 2009-09-22
SWEDEK, BOGUSLAW A.
Executed: 2009-09-18
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Adjusting Polishing Rates by Using Spectrographic Monitoring of a Substrate During Processing