Patent Assignment
Reel/Frame 030410/0768
Assignment of Assignor's Interest
Recorded: 2013-05-14
Pages: 4
Assignors
NAGASEKI, KAZUYA
Executed: 2013-02-25
ITO, ETSUJI
Executed: 2013-02-21
YOKOTA, AKIHIRO
Executed: 2013-02-21
HIMORI, SHINJI
Executed: 2013-02-21
MATSUYAMA, SHOICHIRO
Executed: 2013-02-25
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus