Patent Assignment
Reel/Frame 030420/0463
Assignment of Assignor's Interest
Recorded: 2013-05-15
Pages: 6
Assignors
SU, SHU-HUI
Executed: 2010-02-24
HUANG, CHENG-LIN
Executed: 2010-02-24
YANG, JIING-FENG
Executed: 2010-02-24
WU, ZHEN-CHENG
Executed: 2010-06-21
WU, REN-GUEI
Executed: 2010-06-04
CHEN, DIAN-HAU
Executed: 2010-02-24
MII, YUH-JIER
Executed: 2010-02-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. VI, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Semiconductor Structure Having an Air-Gap Region and a Method of Manufacturing the Same