Patent Assignment
Reel/Frame 030433/0873
Assignment of Assignor's Interest
Recorded: 2013-05-17
Pages: 7
Assignors
CHEN, PO-CHANG
Executed: 2013-04-08
LEU, PO-HSIUNG
Executed: 2013-04-08
LIU, DING-I
Executed: 2013-04-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Gap Fill Self Planarization on Post Epi