Patent Assignment
Reel/Frame 030443/0379
Assignment of Assignor's Interest
Recorded: 2013-05-17
Pages: 4
Assignee
NUFLARE TECHNOLOGY, INC.
2068-3, OOKA, NUMAZU-SHI, SHIZUOKA, 410-8510, JAPAN
Covered Property
(1)
Multi Charged Particle Beam Writing Method and Multi Charged Particle Beam Writing Apparatus