Patent Assignment
Reel/Frame 030474/0367
Assignment of Assignor's Interest
Recorded: 2013-05-23
Pages: 4
Assignors
QIN, CHANGLIANG
Executed: 2012-10-08
HONG, PEIZHEN
Executed: 2012-10-08
YIN, HUAXIANG
Executed: 2012-10-08
Assignee
INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
NO. 3 BEITUCHENG WEST ROAD, CHAOYANG DISTRICT, BEIJING, 100029, CHINA
Covered Property
(1)
Method of Manufacturing Semiconductor Device