Patent Assignment
Reel/Frame 030478/0471
Assignment of Assignor's Interest
Recorded: 2013-05-23
Pages: 2
Assignors
TSAI, CHUN HSIUNG
Executed: 2013-05-16
CHEN, TSAN-YAO
Executed: 2013-05-16
KE, JIAN-AN
Executed: 2013-05-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Asymmetric Cyclic Depositon and Etch Process for Epitaxial Formation Mechanisms of Source and Drain Regions