Patent Assignment
Reel/Frame 030492/0115
Assignment of Assignor's Interest
Recorded: 2013-05-28
Pages: 4
Assignors
TAKAHASHI, KAZUYA
Executed: 2013-05-15
FURUSAWA, YOSHIKAZU
Executed: 2013-05-15
OKADA, MITSUHIRO
Executed: 2013-05-15
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Impurity Diffusion Method, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device