Patent Assignment
Reel/Frame 030494/0956
Assignment of Assignor's Interest
Recorded: 2013-05-28
Pages: 2
Assignor
KURIBAYASHI, AKIHIRO
Executed: 2013-03-29
Assignee
SHINKO ELECTRIC INDUSTRIES CO., LTD.
80, OSHIMADA-MACHI, NAGANO-SHI, NAGANO-KEN, 381-2287, JAPAN
Covered Property
(1)
Electrostatic Chuck and Method for Manufacturing Electrostatic Chuck