Patent Assignment
Reel/Frame 030507/0926
Assignment of Assignor's Interest
Recorded: 2013-05-29
Pages: 3
Assignors
O'NEILL, ROBERT G.
Executed: 2013-05-16
SATO, ARTHUR
Executed: 2013-05-17
TONNIS, ERIC
Executed: 2013-05-17
RAMACHANDRAN, SEETHARAMAN
Executed: 2013-05-16
CHOU, SHANG-I
Executed: 2013-05-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
System, Method and Apparatus for RF Power Compensation in Plasma Etch Chamber