A Modifying Conversion

Recorded: 2013-05-29 Pages: 7

Assignor

CARL ZEISS SMT AG

Executed: 2010-10-14

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Method for Operating an Illumination System of a Microlithographic Projection Exposure Apparatus

Patent: 9,217,931 →

Application: 13/902,100 →

Publication: US 2013/0258303

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.