Patent Assignment
Reel/Frame 030510/0984
Change of Name
Recorded: 2013-05-30
Pages: 9
Assignor
ZAO NIKON CO., LTD.
Executed: 2010-12-28
Assignee
MIYAGI NIKON PRECISION CO., LTD.
20, AZA-SHIN'OYOKE, MIYA, ZAO-MACHI, KATTA-GUN, MIYAGI-KEN, JAPAN
Covered Property
(1)
Substrate Conveyance Device and Substrate Conveyance Method, Exposure Apparatus and Exposure Method, Device Manufacturing Method