Patent Assignment
Reel/Frame 030535/0557
Assignment of Assignor's Interest
Recorded: 2013-06-03
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Temperature Controlled Substrate Support Assembly
Application:
13/908,676 →
Publication:
US 2014/0356985