Patent Assignment
Reel/Frame 030553/0652
Assignment of Assignor's Interest
Recorded: 2013-06-05
Pages: 3
Assignor
VARADARAJAN, BHADRI N.
Executed: 2013-05-31
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
METHOD TO OBTAIN SiC CLASS OF FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES