Patent Assignment
Reel/Frame 030576/0647
Assignment of Assignor's Interest
Recorded: 2013-06-10
Pages: 6
Assignee
NISSIN ION EQUIPMENT CO., LTD.
575, KUZE-TONOSHIRO-CHO, MINAMI-KU, KYOTO, 601-8205, JAPAN
Covered Property
(1)
Ion Source Having at Least One Electron Gun Comprising a Gas Inlet and a Plasma Region Defined by an Anode and a Ground Element Thereof