Patent Assignment
Reel/Frame 030577/0328
Assignment of Assignor's Interest
Recorded: 2013-06-10
Pages: 6
Assignors
VENKATARAMAN, SHYAM SUNDAR
Executed: 2011-12-23
SU, EASON YU-SHEN
Executed: 2012-02-10
KINGMA, AREND JOUKE
Executed: 2012-04-11
NOLLER, BASTIAN MARTEN
Executed: 2012-04-05
Assignee
BASF SE
., LUDWIGSHAFEN, 67056, GERMANY
Covered Property
(1)
Aqueous Polishing Composition and Process for Chemically Mechanically Polishing Substrates Containing Silicon Oxide Dielectric and Polysilicon Films