Patent Assignment
Reel/Frame 030577/0489
Assignment of Assignor's Interest
Recorded: 2013-06-10
Pages: 7
Assignors
KIRIKIHIRA, KAORI
Executed: 2013-03-08
ORIHASHI, YUGO
Executed: 2013-03-07
SHIMAMOTO, SATOSHI
Executed: 2013-03-07
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.