Patent Assignment
Reel/Frame 030584/0726
Assignment of Assignor's Interest
Recorded: 2013-06-11
Pages: 5
Assignee
NOVELLUS SYSTEMS, INC.
4000 N. FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
Diagnostic and Control Systems and Methods for Substrate Processing Systems Using Dc Self-Bias Voltage