Patent Assignment
Reel/Frame 030599/0689
Assignment of Assignor's Interest
Recorded: 2013-06-12
Pages: 4
Assignors
THEDJOISWORO, BAYU
Executed: 2013-06-11
KUO, JACK
Executed: 2013-06-11
CHEUNG, DAVID
Executed: 2013-06-11
PARK, JOON
Executed: 2013-06-11
Assignee
NOVELLUS SYSTEMS, INC.
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Polysilicon Etch with High Selectivity