Patent Assignment
Reel/Frame 030616/0070
Assignment of Assignor's Interest
Recorded: 2013-06-14
Pages: 8
Assignors
CHISHOLM, RICHARD V.
Executed: 2013-06-10
PEITZSCH, SCOTT E.
Executed: 2013-06-11
ESPOSITO, MICHAEL
Executed: 2013-06-10
POITRAS, ROBERT A.
Executed: 2013-06-10
ANELLA, STEVEN M.
Executed: 2013-06-10
HALL, DANIEL A.
Executed: 2013-06-10
HOLDEN, SCOTT C.
Executed: 2013-06-10
FISH, ROGER B.
Executed: 2013-06-10
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Force Sensing System for Substrate Lifting Apparatus