Patent Assignment
Reel/Frame 030652/0092
Assignment of Assignor's Interest
Recorded: 2013-06-20
Pages: 9
Assignors
SANO, ATSUSHI
Executed: 2013-03-15
HIROSE, YOSHIRO
Executed: 2013-03-15
MAEDA, KIYOHIKO
Executed: 2013-03-15
OKUDA, KAZUYUKI
Executed: 2013-03-15
YAMAMOTO, RYUJI
Executed: 2013-03-19
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.