Patent Assignment
Reel/Frame 030654/0817
Assignment of Assignor's Interest
Recorded: 2013-06-20
Pages: 4
Assignors
MAEDA, KENJI
Executed: 2013-05-09
YOSHIOKA, KEN
Executed: 2013-05-23
KAWASAKI, HIROMICHI
Executed: 2013-05-14
SHIMOMURA, TAKAHIRO
Executed: 2013-05-29
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHISHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.