Patent Assignment
Reel/Frame 030664/0830
Assignment of Assignor's Interest
Recorded: 2013-06-21
Pages: 5
Assignors
WU, LI-LAN
Executed: 2013-06-14
CHEN, CHI-YUAN
Executed: 2013-06-14
LIU, MING-CHYI
Executed: 2013-06-20
LO, CARY CHIA-CHIUNG
Executed: 2013-06-20
TSAI, TENG-CHUN
Executed: 2013-06-14
LIN, CHENG-TUNG
Executed: 2013-06-14
LIN, KUO-YIN
Executed: 2013-06-14
WANG, LI-TING
Executed: 2013-06-14
PAN, WAN-CHUN
Executed: 2013-06-14
YEN, MING-LIANG
Executed: 2013-06-20
CHANG, HUICHENG
Executed: 2013-06-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Methods for Wet Clean of Oxide Layers over Epitaxial Layers