Patent Assignment
Reel/Frame 030665/0128
Assignment of Assignor's Interest
Recorded: 2013-06-21
Pages: 3
Assignor
IIZUKA, HACHISHIRO
Executed: 2013-03-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus