Patent Assignment
Reel/Frame 030665/0359
Assignment of Assignor's Interest
Recorded: 2013-06-21
Pages: 6
Assignors
MENG, XIANPING
Executed: 2013-06-19
CHEN, BINGFU
Executed: 2013-06-19
HU, LICHENG
Executed: 2013-06-19
Assignee
MACRONIX INTERNATIONAL CO., LTD.
NO. 16, LI-HSIN ROAD, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, TAIWAN
Covered Property
(1)
Apparatus and Method for Collecting Powder Generated During Film Deposition Process