Patent Assignment
Reel/Frame 030677/0342
Assignment of Assignor's Interest
Recorded: 2013-06-25
Pages: 2
Assignor
AKADA, HIKARU
Executed: 2013-06-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Measuring Substrate, Substrate Treatment Apparatus and Substrate Treatment Apparatus Operation Method