Patent Assignment
Reel/Frame 030712/0932
Assignment of Assignor's Interest
Recorded: 2013-06-28
Pages: 14
Assignors
FUKUSHIMA, MAKOTO
Executed: 2013-04-19
YASUDA, HOZUMI
Executed: 2013-04-19
NAMIKI, KEISUKE
Executed: 2013-04-19
NABEYA, OSAMU
Executed: 2013-04-19
TOGASHI, SHINGO
Executed: 2013-04-19
YAMAKI, SATORU
Executed: 2013-04-19
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method