Patent Assignment
Reel/Frame 030713/0312
Assignment of Assignor's Interest
Recorded: 2013-06-28
Pages: 10
Assignors
NAMIKI, KEISUKE
Executed: 2013-06-13
YASUDA, HOZUMI
Executed: 2013-06-13
NABEYA, OSAMU
Executed: 2013-06-13
FUKUSHIMA, MAKOTO
Executed: 2013-06-13
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Holding Apparatus and Polishing Apparatus