Patent Assignment
Reel/Frame 030716/0969
Assignment of Assignor's Interest
Recorded: 2013-07-01
Pages: 6
Assignors
ZHAO, JIANPING
Executed: 2013-06-20
CHEN, LEE
Executed: 2013-06-20
FUNK, MERRITT
Executed: 2013-06-20
SUNDARARAJAN, RADHA
Executed: 2013-06-05
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Low Electron Temperature, Edge-Density Enhanced, Surface Wave Plasma (Swp) Processing Method and Apparatus