Patent Assignment
Reel/Frame 030721/0120
Assignment of Assignor's Interest
Recorded: 2013-07-01
Pages: 2
Assignors
LILL, THORSTEN
Executed: 2013-06-24
SINGH, HARMEET
Executed: 2013-06-25
PATERSON, ALEX
Executed: 2013-06-27
KAMARTHY, GOWRI
Executed: 2013-06-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Controlling Ion Energy Within A Plasma Chamber